eprintid: 10196865 rev_number: 8 eprint_status: archive userid: 699 dir: disk0/10/19/68/65 datestamp: 2024-09-11 12:48:00 lastmod: 2025-02-08 07:10:07 status_changed: 2024-09-11 12:48:00 type: article metadata_visibility: show sword_depositor: 699 creators_name: Padovani, A creators_name: La Torraca, P creators_name: Strand, J creators_name: Larcher, L creators_name: Shluger, AL title: Dielectric breakdown of oxide films in electronic devices ispublished: pub divisions: UCL divisions: B04 divisions: C06 divisions: F60 keywords: Electrical and electronic engineering, Electronic devices note: This version is the author accepted manuscript. For information on re-use, please refer to the publisher's terms and conditions. abstract: Dielectric breakdown is a sudden and catastrophic increase in the conductivity of an insulator caused by electrical stress. It is one of the major reliability issues in electronic devices using insulating films as gate insulators and in energy and memory capacitors. Despite extensive studies, our understanding of the physical mechanisms driving the breakdown process remains incomplete, and atomistic models describing the dielectric breakdown are controversial. This Review surveys the enormous amount of data and knowledge accumulated from experimental and theoretical studies of dielectric breakdown in different insulating materials, focusing on describing phenomenological models and novel computational approaches. date: 2024-09 date_type: published publisher: Springer Science and Business Media LLC official_url: http://dx.doi.org/10.1038/s41578-024-00702-0 oa_status: green full_text_type: other language: eng primo: open primo_central: open_green verified: verified_manual elements_id: 2305421 doi: 10.1038/s41578-024-00702-0 lyricists_name: Shluger, Alexander lyricists_id: ASHLU39 actors_name: Kalinowski, Damian actors_id: DKALI47 actors_role: owner full_text_status: public publication: Nature Reviews Materials volume: 9 pagerange: 607-627 citation: Padovani, A; La Torraca, P; Strand, J; Larcher, L; Shluger, AL; (2024) Dielectric breakdown of oxide films in electronic devices. Nature Reviews Materials , 9 pp. 607-627. 10.1038/s41578-024-00702-0 <https://doi.org/10.1038/s41578-024-00702-0>. Green open access document_url: https://discovery.ucl.ac.uk/id/eprint/10196865/1/Shluger_Dielectric%20breakdown%20of%20oxide%20films%20in%20electronic%20devices_AAM.pdf