TY - JOUR TI - Transparent Conductive Titanium and Fluorine Co-doped Zinc Oxide Films KW - Transparent conducting oxides KW - Co-doped Zinc oxide KW - Titanium and Fluorine co-doped Zinc oxide KW - electronic materials KW - wide band gap mater UR - https://doi.org/10.1002/cplu.202400073 Y1 - 2024/04/09/ PB - Wiley A1 - Ramzan, Iqra A1 - Borowiec, Joanna A1 - Parkin, Ivan A1 - Carmalt, Claire J N2 - Aerosol-assisted chemical vapor deposition (AACVD) was used to deposit highly transparent and conductive titanium or fluorine-doped and titanium-fluorine co-doped ZnO thin films on glass substrate at 450 oC. All films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), UV-Vis spectroscopy, scanning electron spectroscopy (SEM), and four-point probe. The films were 600-680 nm thick, crystalline, and highly transparent (80-87%). The co-doped film consisted of 0.70 at.% titanium and 1 at.% fluorine, and displayed a charger carrier mobility, charge carrier concentration, and a minimum resistivity of 8.4 cm2 V-1 s-1, 3.97 x 1020 cm-3, and 1.69 x 10-3 ? cm, respectively. A band gap of 3.6 eV was observed for the co-doped film. Compared to the undoped and singly doped films, the co-doped film displayed a notably higher structure morphology (more homogenous grains with well-defined boundaries) suitable for transparent conducting oxide applications. JF - Chempluschem AV - public ID - discovery10192299 N1 - © 2024 The Authors. ChemPlusChem published by Wiley-VCH GmbH This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited. SN - 2192-6506 ER -