?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M-L&rft.au=Hicks%2C+M-L&rft.aulast=Hicks&rft.atitle=Diamond+Etching+Beyond+10+%CE%BCm+with+Near-Zero+Micromasking&rft.date=30+October+2019&rft.title=Scientific+Reports&rft.volume=9&rft.genre=article