%I IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
%P 5361-5367
%X We report the development of a temperature sensing probe created as a result of the combination of an optical fiber and a porous silicon microcavity (PSMC). After determining the physical parameters of the PSMC to achieve the required porous sensing structure, it was fabricated by electrochemically etching a silicon wafer. A 1-mm^{2} PSMC piece was attached to the tip of an optical fiber so that temperature variations can be monitored in real-time exactly on that point. First, the performance of the PSMC sensor probe was characterized in a stable environment as water, obtaining a sensitivity around 110 pm/°C and a resolution in the 10^{-4}°C range. Afterward, the temperature transmission dynamics in air environment were studied.
%A R Caroselli
%A D Martin Sanchez
%A S Ponce-Alcantara
%A F Prats Quilez
%A L Torrijos Moran
%A J Garcia-Ruperez
%D 2018
%O © The Authors. This work is licensed under a Creative Commons Attribution 3.0 License. For more information, see (http://creativecommons.org/licenses/by/3.0/)
%T Experimental Study of a Real-Time and Highly Sensitive Fiber-Optic Porous Silicon Temperature Sensing Probe
%K Fiber-optic sensor, porous silicon, Bragg reflector, microcavity, temperature monitoring
%L discovery10082998
%V 18
%J IEEE Sensors Journal
%N 13