TY  - JOUR
EP  - 5367
AV  - public
Y1  - 2018/07//
TI  - Experimental Study of a Real-Time and Highly Sensitive Fiber-Optic Porous Silicon Temperature Sensing Probe
PB  - IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ID  - discovery10082998
N2  - We report the development of a temperature sensing probe created as a result of the combination of an optical fiber and a porous silicon microcavity (PSMC). After determining the physical parameters of the PSMC to achieve the required porous sensing structure, it was fabricated by electrochemically etching a silicon wafer. A 1-mm^{2} PSMC piece was attached to the tip of an optical fiber so that temperature variations can be monitored in real-time exactly on that point. First, the performance of the PSMC sensor probe was characterized in a stable environment as water, obtaining a sensitivity around 110 pm/°C and a resolution in the 10^{-4}°C range. Afterward, the temperature transmission dynamics in air environment were studied.
KW  - Fiber-optic sensor
KW  -  porous silicon
KW  -  Bragg reflector
KW  -  microcavity
KW  -  temperature monitoring
SP  - 5361
VL  - 18
N1  - © The Authors. This work is licensed under a Creative Commons Attribution 3.0 License. For more information, see (http://creativecommons.org/licenses/by/3.0/)
IS  - 13
SN  - 1558-1748
UR  - https://doi.org/10.1109/JSEN.2018.2824349
A1  - Caroselli, R
A1  - Martin Sanchez, D
A1  - Ponce-Alcantara, S
A1  - Prats Quilez, F
A1  - Torrijos Moran, L
A1  - Garcia-Ruperez, J
JF  - IEEE Sensors Journal
ER  -