@article{discovery10082998, number = {13}, month = {July}, journal = {IEEE Sensors Journal}, publisher = {IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC}, year = {2018}, title = {Experimental Study of a Real-Time and Highly Sensitive Fiber-Optic Porous Silicon Temperature Sensing Probe}, note = {{\copyright} The Authors. This work is licensed under a Creative Commons Attribution 3.0 License. For more information, see (http://creativecommons.org/licenses/by/3.0/)}, volume = {18}, pages = {5361--5367}, author = {Caroselli, R and Martin Sanchez, D and Ponce-Alcantara, S and Prats Quilez, F and Torrijos Moran, L and Garcia-Ruperez, J}, issn = {1558-1748}, abstract = {We report the development of a temperature sensing probe created as a result of the combination of an optical fiber and a porous silicon microcavity (PSMC). After determining the physical parameters of the PSMC to achieve the required porous sensing structure, it was fabricated by electrochemically etching a silicon wafer. A 1-mm{\^{ }}\{2\} PSMC piece was attached to the tip of an optical fiber so that temperature variations can be monitored in real-time exactly on that point. First, the performance of the PSMC sensor probe was characterized in a stable environment as water, obtaining a sensitivity around 110 pm/oC and a resolution in the 10{\^{ }}\{-4\}oC range. Afterward, the temperature transmission dynamics in air environment were studied.}, url = {https://doi.org/10.1109/JSEN.2018.2824349}, keywords = {Fiber-optic sensor, porous silicon, Bragg reflector, microcavity, temperature monitoring} }