?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M-L&rft.au=Hicks%2C+M-L&rft.aulast=Hicks&rft.issue=24&rft.volume=125&rft.issn=1089-7550&rft.title=Journal+of+Applied+Physics&rft.atitle=Optimizing+reactive+ion+etching+to+remove+sub-surface+polishing+damage+on+diamond&rft.date=28+June+2019&rft.genre=article