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Law, V.J.; Kenyon, A.J.; Thornhill, N.F.; Srigengan, V.; Batty, I.; (2000) Remote-coupled sensing of plasma harmonics and process end-point detection. Vacuum , 57 (4) pp. 351-364. 10.1016/S0042-207X(00)00229-3.

This list was generated on Sun Nov 19 01:28:16 2017 GMT.