Titanium imido complexes as precursors to titanium nitride.
J CHEM SOC DALTON
4055 - 4059.
Treatment of TiCl4 with 2-4 fold excess of (BuN)-N-t(H) SiMe3 in CH2Cl2 resulted in the formation of orange crystals of [TiCl2 (NBut)(NH2But)](4), the X-ray crystal structure of which has been determined. In the presence of excess pyridine, the reaction of TiCl4 with 1 equivalent of (BuN)-N-t(H) SiMe3 resulted in the isolation of the monomeric complex [TiCl2 (NBut)(py)(3)]. Low pressure chemical vapour deposition of [TiCl2 (NBut)(py)(3)] forms thin films of titanium nitride (a = 4.23(1) Angstrom, XPS TiN0.75) at 600 degreesC.
|Title:||Titanium imido complexes as precursors to titanium nitride|
|Keywords:||CHEMICAL-VAPOR-DEPOSITION, SINGLE-SOURCE PRECURSOR, X-RAY-STRUCTURE, THIN-FILMS, MOLECULAR-STRUCTURE, IRON(II) CHLORIDE, CRYSTAL-STRUCTURE, TETRACHLORIDE, DERIVATIVES, EXCHANGE|
|UCL classification:||UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > MAPS Faculty Office
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