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Titanium imido complexes as precursors to titanium nitride

Carmalt, CJ; Newport, AC; Parkin, IP; White, AJP; Williams, DJ; (2002) Titanium imido complexes as precursors to titanium nitride. J CHEM SOC DALTON (21) 4055 - 4059. 10.1039/b204027c.

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Abstract

Treatment of TiCl4 with 2-4 fold excess of (BuN)-N-t(H) SiMe3 in CH2Cl2 resulted in the formation of orange crystals of [TiCl2 (NBut)(NH2But)](4), the X-ray crystal structure of which has been determined. In the presence of excess pyridine, the reaction of TiCl4 with 1 equivalent of (BuN)-N-t(H) SiMe3 resulted in the isolation of the monomeric complex [TiCl2 (NBut)(py)(3)]. Low pressure chemical vapour deposition of [TiCl2 (NBut)(py)(3)] forms thin films of titanium nitride (a = 4.23(1) Angstrom, XPS TiN0.75) at 600 degreesC.

Type:Article
Title:Titanium imido complexes as precursors to titanium nitride
DOI:10.1039/b204027c
Keywords:CHEMICAL-VAPOR-DEPOSITION, SINGLE-SOURCE PRECURSOR, X-RAY-STRUCTURE, THIN-FILMS, MOLECULAR-STRUCTURE, IRON(II) CHLORIDE, CRYSTAL-STRUCTURE, TETRACHLORIDE, DERIVATIVES, EXCHANGE
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > Chemistry

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