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MOCVD Of Zirconium Oxide From The Zirconium Guanidinate Complex [ZrCp '{eta(2)-((PrN)-Pr-i)(2)CNMe2}(2)Cl]

Blackman, CS; Carmalt, CJ; Moniz, SJA; Potts, SE; Davies, HO; Pugh, DC; (2009) MOCVD Of Zirconium Oxide From The Zirconium Guanidinate Complex [ZrCp '{eta(2)-((PrN)-Pr-i)(2)CNMe2}(2)Cl]. In: Swihart, MT and Barreca, D and Adomaitis, RA and Worhoff, K, (eds.) (Proceedings) Joint Conference on EuroCVD / 17th International Chemical Vapor Deposition Symposium (CVD) held jointly at the 216th Meeting of the Electrochemical-Society. (pp. pp. 561-565). ELECTROCHEMICAL SOC INC

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Type: Proceedings paper
Title: MOCVD Of Zirconium Oxide From The Zirconium Guanidinate Complex [ZrCp '{eta(2)-((PrN)-Pr-i)(2)CNMe2}(2)Cl]
Event: Joint Conference on EuroCVD / 17th International Chemical Vapor Deposition Symposium (CVD) held jointly at the 216th Meeting of the Electrochemical-Society
Location: Vienna, AUSTRIA
Dates: 04 October 2009 - 09 October 2009
ISBN-13: 978-1-56677-745-2
DOI: 10.1149/1.3207640
Keywords: Science & Technology, Physical Sciences, Technology, Electrochemistry, Nanoscience & Nanotechnology, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Science & Technology - Other Topics, Materials Science, CHEMICAL-VAPOR-DEPOSITION, TITANIUM IMIDO COMPLEXES, NITRIDE THIN-FILMS, DUAL SOURCE APCVD, PRECURSORS, CARBONITRIDE, CVD, TANTALUM
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Maths and Physical Sciences
URI: http://discovery.ucl.ac.uk/id/eprint/768512
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