Characterization and gas sensing properties of intrinsic and Au-doped WO3 nanostructures deposited by AACVD technique.
Aerosol Assisted Chemical Vapour Deposition (AACVD) was implemented to grow WO3 layers with nanoneeddle-like morphology onto gas sensor alumina substrates from a W(OPh)6 precursor. A variety of solvents and deposition temperatures in a range of 350°C and 500°C were used in order to find the optimal deposition conditions. The obtained WO3 structure was doped with gold particles by rf sputtering. The WO3 gas sensor based on nanoneedles showed high selectivity against to NO2 . The sensing properties of WO3 nanoneedle-like structure, as well as influence of gold doping in their sensing properties were examined in this work.
|Title:||Characterization and gas sensing properties of intrinsic and Au-doped WO3 nanostructures deposited by AACVD technique|
|Keywords:||Aerosol assited chemical vapor deposition, Gas sensors, Metal oxide, Nanoneedle, WO 3|
|UCL classification:||UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > Chemistry
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