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Nanodiamond-coated silicon cantilever array for chemical sensing

HUDZIAK, S; Ahmed, R; Parada, A; Chaudhary, A; Jackman, R; (2010) Nanodiamond-coated silicon cantilever array for chemical sensing. Applied Physics Letters , 97 , Article 093103. 10.1063/1.3484277.

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Abstract

Diamond offers attractive properties as a material for microelectromechanical chemical sensors but is difficult to process in comparison with silicon. Here a method for attaching detonation-derived nanodiamonds to prefabricated and mounted Si cantilever devices is described. It is shown that this hybrid device has a resonant frequency shifted down, compared to Si alone, by around 10% due to a higher spring constant. Exposure to 2,4-dinitrotoluene leads to an easily observed decrease in resonant frequency. The mechanisms behind these observations are discussed and the promise for this form of hybrid cantilever structure for chemical sensors applications highlighted.

Type:Article
Title:Nanodiamond-coated silicon cantilever array for chemical sensing
Location:USA
DOI:10.1063/1.3484277
Publisher version:http://m.apl.aip.org/
Keywords:Nanodiamond, AFM, MEMS, microcantilever
UCL classification:UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering

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