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OXIDATION OF SILICON

STONEHAM, AM; (1991) OXIDATION OF SILICON. Presented at: 7TH BIENNIAL EUROPEAN CONF ON INSULATING FILMS ON SEMICONDUCTORS 1991, UNIV LIVERPOOL, LIVERPOOL, ENGLAND.

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Type: Conference item (UNSPECIFIED)
Title: OXIDATION OF SILICON
Event: 7TH BIENNIAL EUROPEAN CONF ON INSULATING FILMS ON SEMICONDUCTORS 1991
Location: UNIV LIVERPOOL, LIVERPOOL, ENGLAND
Dates: 02 April 1991 - 06 April 1991
ISBN: 0-7503-0168-6
UCL classification: UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > Physics and Astronomy
URI: http://discovery.ucl.ac.uk/id/eprint/59637
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