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OXIDATION OF SILICON

STONEHAM, AM; (1991) OXIDATION OF SILICON. In: ECCLESTON, W and UREN, M, (eds.) INSULATING FILMS ON SEMICONDUCTORS 1991. (pp. 19 - 32). ADAM HILGER LTD

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Type:Proceedings paper
Title:OXIDATION OF SILICON
Event:7TH BIENNIAL EUROPEAN CONF ON INSULATING FILMS ON SEMICONDUCTORS 1991
Location:UNIV LIVERPOOL, LIVERPOOL, ENGLAND
Dates:1991-04-02 - 1991-04-06
ISBN:0-7503-0168-6
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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