STONEHAM, AM (1991) OXIDATION OF SILICON. In: ECCLESTON, W and UREN, M, (eds.) INSULATING FILMS ON SEMICONDUCTORS 1991. (pp. 19 - 32). ADAM HILGER LTD
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| Type: | Proceedings paper |
|---|---|
| Title: | OXIDATION OF SILICON |
| Event: | 7TH BIENNIAL EUROPEAN CONF ON INSULATING FILMS ON SEMICONDUCTORS 1991 |
| Location: | UNIV LIVERPOOL, LIVERPOOL, ENGLAND |
| Dates: | 1991-04-02 - 1991-04-06 |
| ISBN: | 0-7503-0168-6 |
| UCL classification: | UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology |
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