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A frequency domain measurement diagnostic technique for plasma-tools

Law, VJ; Kenyon, AJ; Thornhill, NF; Pagliarani, A; Lea, L; Watkins, M; (2004) A frequency domain measurement diagnostic technique for plasma-tools. MEAS SCI TECHNOL , 15 (1) 231 - 236. 10.1088/0957-0233/15/1/033.

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Abstract

The design of a 10-500 MHz bridge is described and also its use with a tracking generator and spectrum analyser to form a scalar network analyser for the investigation of the internal electro-mechanical components of a parallel-plate and inductively-coupled plasma-tool. The non-invasive frequency scalar data obtained (with the plasma off) provides a frequency related registration of the internal components of the plasma-tool for given match network settings. Frequency data are presented for a parallel-plate chamber and a STS plc inductively-coupled plasma-tool as viewed via the lower electrode platen. Components identified relating to these chambers are the matching network, electrode position, wafer loading arm, wafer lift pin position and silicon wafer dislodgement. The data are used for comparing similar build configurations and fault conditions.

Type: Article
Title: A frequency domain measurement diagnostic technique for plasma-tools
DOI: 10.1088/0957-0233/15/1/033
Keywords: plasma-tool diagnostics, fault detection, VHF frequency, RF PROBE
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/439
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