Lee, C-H and Sazonov, A and Nathan, A (2004) Low temperature (75<sup>o</sup>C) hydrogenated nanocrystalline silicon films grown by conventional plasma enhanced chemical vapor deposition for thin film transistors. Materials Research Society Symposium Proceedings , 808
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| Type: | Article |
|---|---|
| Title: | Low temperature (75<sup>o</sup>C) hydrogenated nanocrystalline silicon films grown by conventional plasma enhanced chemical vapor deposition for thin film transistors |
| UCL classification: | UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology |
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