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Botttom-gate TFT's with channel layer grown by pulsed PECVD technique

Grant, DJ; Lee, C-H; Nathan, A; Das, UK; Madan, A; (2004) Botttom-gate TFT's with channel layer grown by pulsed PECVD technique. Materials Research Society Symposium Proceedings , 808

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Type:Article
Title:Botttom-gate TFT's with channel layer grown by pulsed PECVD technique
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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