Chan, I and Nathan, A (2004) Thick film resist lithography for a Si:H vertical thin film transistors. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films , 22 1048 - 1053.
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| Type: | Article |
|---|---|
| Title: | Thick film resist lithography for a Si:H vertical thin film transistors |
| UCL classification: | UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology |
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