Chan, I and Nathan, A (2004) Thick film resist lithography for a Si:H vertical thin film transistors. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films , 22 1048 - 1053.
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|Title:||Thick film resist lithography for a Si:H vertical thin film transistors|
|UCL classification:||UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology|
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