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Thick film resist lithography for a Si:H vertical thin film transistors

Chan, I; Nathan, A; (2004) Thick film resist lithography for a Si:H vertical thin film transistors. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films , 22 1048 - 1053.

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Type:Article
Title:Thick film resist lithography for a Si:H vertical thin film transistors
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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