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Highly conductive n+ hydrogenated microcrystalline silicon and its application in thin film transistors

Lee, C-H; Striakhilev D, N; A, ; (2004) Highly conductive n+ hydrogenated microcrystalline silicon and its application in thin film transistors. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films , 22 991 - 995.

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Type: Article
Title: Highly conductive n+ hydrogenated microcrystalline silicon and its application in thin film transistors
UCL classification: UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/42717
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