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Growth of titanium silicate thin films by photo-induced chemical vapor deposition

Wang, ZM and Fang, Q and Zhang, J-Y and Wu, JX and Di, Y and Chen, W and Chen, ML and Boyd, IW (2004) Growth of titanium silicate thin films by photo-induced chemical vapor deposition. Thin Solid Films , 453-454 167 - 171.

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Type:Article
Title:Growth of titanium silicate thin films by photo-induced chemical vapor deposition
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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