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Correlation of compositional and structural changes during pulsed laser deposition of tantalum oxide films

Geretovszky, Z; Szorenyi, T; Stoquert, JP; Boyd, IW; (2004) Correlation of compositional and structural changes during pulsed laser deposition of tantalum oxide films. THIN SOLID FILMS , 453 pp. 245-250. 10.1016/j.tsf.2003.11.129.

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Type: Article
Title: Correlation of compositional and structural changes during pulsed laser deposition of tantalum oxide films
Location: Strasbourg, FRANCE
DOI: 10.1016/j.tsf.2003.11.129
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, pulsed laser deposition, tantalum oxide, elemental deposition rate, stoichiometry, PENTOXIDE FILM, THIN-FILMS, TA2O5, ABLATION, OXYGEN, GAS, TA
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/42162
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