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Electrical characterization of photo-oxidized Si 1-x-y Ge xCy films

Bjeletich, PJ and Peterson, JJ and Cuadras, Á and Fang, Q and Zhang, J-Y and Robinson, M and Boyd, IW and Hunt, CE (2004) Electrical characterization of photo-oxidized Si 1-x-y Ge xCy films. Microelectronic Engineering , 72 (1-4) 218 - 222.

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Type:Article
Title:Electrical characterization of photo-oxidized Si 1-x-y Ge xCy films
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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