UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

Excimer UV-assisted preparation of zirconium silicate layers

Yu, JJ; Boyd, IW; (2004) Excimer UV-assisted preparation of zirconium silicate layers. THIN SOLID FILMS , 453 pp. 215-218. 10.1016/j.tsf.2003.11.122.

Full text not available from this repository.
Type: Article
Title: Excimer UV-assisted preparation of zirconium silicate layers
Location: Strasbourg, FRANCE
DOI: 10.1016/j.tsf.2003.11.122
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, silicate, zirconium, excimer lamps, photon processing, sol-gel processing, GATE DIELECTRICS, FILMS, DEPOSITION, SI
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Maths and Physical Sciences
UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/42160
Downloads since deposit
0Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item