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Process issues with Mo/a-Si:H Schottky diode and TFT integration for direct X-ray detection

Lee, C-H; Vygranenko, Y; Nathan, A; (2004) Process issues with Mo/a-Si:H Schottky diode and TFT integration for direct X-ray detection. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films , 22 2091 - 2095.

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Type: Article
Title: Process issues with Mo/a-Si:H Schottky diode and TFT integration for direct X-ray detection
UCL classification: UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/40699
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