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Process issues with Mo/a-Si:H Schottky diode and TFT integration for direct X-ray detection

Lee, C-H; Vygranenko, Y; Nathan, A; (2004) Process issues with Mo/a-Si:H Schottky diode and TFT integration for direct X-ray detection. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films , 22 2091 - 2095.

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Type:Article
Title:Process issues with Mo/a-Si:H Schottky diode and TFT integration for direct X-ray detection
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology

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