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Low temperature Si oxidation with excimer lamp sources

Boyd, IW; Zhang, JY; (1997) Low temperature Si oxidation with excimer lamp sources. In: Riley, TJ and Gelpey, JC and Roozeboom, F and Saito, S, (eds.) UNSPECIFIED (pp. 343-354). MATERIALS RESEARCH SOCIETY

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Type: Book chapter
Title: Low temperature Si oxidation with excimer lamp sources
ISBN: 1-55899-374-6
DOI: 10.1557/PROC-470-343
Keywords: Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/34873
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