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Invited Paper: Oxidation of Si and SiGe by UV and VUV Radiation

Boyd, IW; (1997) Invited Paper: Oxidation of Si and SiGe by UV and VUV Radiation. In: (Proceedings) MRS Spring Meeting, 1997, San Francisco, USA,.

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Abstract

April 1997

Type: Proceedings paper
Title: Invited Paper: Oxidation of Si and SiGe by UV and VUV Radiation
Event: MRS Spring Meeting, 1997, San Francisco, USA,
Dates: April 3997
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/34869
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