UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

Measuring the metrology gap - Three-dimensional metrology at the mesoscopic level

Peggs, GN; Lewis, AJ; Leach, RK; (2004) Measuring the metrology gap - Three-dimensional metrology at the mesoscopic level. Journal of Manufacturing Processes , 6 (1) pp. 117-124. 10.1016/S1526-6125(04)70065-1.

Full text not available from this repository.

Abstract

There is a wide range of instruments, such as height gauges, micrometers, and coordinate measuring machines (CMMs), designed to measure macroscopic features on mass-produced components. Equally, there are many instruments designed to measure surface features at the nanometer scale, for example, the atomic force microscope. However, there is a dearth of instruments capable of measuring tiny objects with small features at the micrometer scale. As a first step to develop metrology tools to operate in the mesoscopic regime, the UK's National Physical Laboratory (NPL) has designed and manufactured a small-component CMM with a 50 × 50 × 50 mm measuring volume and a volumetric uncertainty better than 100 nm (95% confidence interval). This CMM is one of a group of such instruments being developed in several European research institutes. An overview of the current research on small CMMs is given, before looking in detail at the NPL instrument. Current work at NPL on the development of probing systems for use at even smaller scales, targeted at developing the next generation of microscale CMMs, is then described.

Type: Article
Title: Measuring the metrology gap - Three-dimensional metrology at the mesoscopic level
DOI: 10.1016/S1526-6125(04)70065-1
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Civil, Environ and Geomatic Eng
URI: http://discovery.ucl.ac.uk/id/eprint/1549480
Downloads since deposit
0Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item