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Three-wavelength phase-stepping interferometer for length measurement up to 1.5 m in a controlled environment

Lewis, AJ; (1992) Three-wavelength phase-stepping interferometer for length measurement up to 1.5 m in a controlled environment. In: (pp. p. 2).

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Type: Proceedings paper
Title: Three-wavelength phase-stepping interferometer for length measurement up to 1.5 m in a controlled environment
UCL classification: UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
URI: http://discovery.ucl.ac.uk/id/eprint/1548463
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