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CHARACTERISATION OF EXCIMER LAMP PHOTO-DEPOSITED ULTRATHIN OXYNITRIDE FILMS

LYNCH, S; OCONNOR, GM; CREAN, GM; ZHANG, JY; GERETOVSZKY, Z; BERGONZO, P; BOYD, IW; (1995) CHARACTERISATION OF EXCIMER LAMP PHOTO-DEPOSITED ULTRATHIN OXYNITRIDE FILMS. In: Dubowski, JJ, (ed.) (Proceedings) Conference on Laser-Induced Thin Film Processing. (pp. pp. 302-310). SPIE - INT SOC OPTICAL ENGINEERING

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Type: Proceedings paper
Title: CHARACTERISATION OF EXCIMER LAMP PHOTO-DEPOSITED ULTRATHIN OXYNITRIDE FILMS
Event: Conference on Laser-Induced Thin Film Processing
Location: SAN JOSE, CA
Dates: 08 February 1995 - 10 February 1995
ISBN: 0-8194-1750-5
DOI: 10.1117/12.206261
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Coatings & Films, Optics, Materials Science, PHOTOCHEMICAL DEPOSITION, EXCIMER LAMP, SILICON OXYNITRIDE, OPTICAL PROPERTIES, SPECTROSCOPIC ELLIPSOMETRY, REFRACTIVE INDEX, FOURIER TRANSFORM INFRARED SPECTROSCOPY
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/1541479
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