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A Planar CMOS Field-Emission Vacuum Magnetic Sensor

French, PJ; Kenyon, AJ; Garner, DM; (2009) A Planar CMOS Field-Emission Vacuum Magnetic Sensor. IEEE Transactions on Electron Devices , 56 (4) 692 - 695. 10.1109/TED.2009.2014430. Green open access

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Abstract

We have fabricated a CMOS vacuum magnetic sensor that exploits the deflection of an electron beam produced by field emission by a perpendicular magnetic field. The device is planar and fabricated by conventional lithography and etching processes. An extremely high magnetic field sensitivity of 4 x 10(3)%/T is reported.

Type:Article
Title:A Planar CMOS Field-Emission Vacuum Magnetic Sensor
Open access status:An open access version is available from UCL Discovery
DOI:10.1109/TED.2009.2014430
Publisher version:http://dx.doi.org/10.1109/TED.2009.2014430
Language:English
Additional information:© 2009 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Keywords:CMOS, field emission, magnetic sensing, EMITTER TIP, DESIGN
UCL classification:UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering

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