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Aerosol-Assisted Chemical Vapour Deposition of Transparent Zinc Gallate Films

Knapp, CE; Manzi, JA; Kafizas, A; Parkin, IP; Carmalt, CJ; (2014) Aerosol-Assisted Chemical Vapour Deposition of Transparent Zinc Gallate Films. ChemPlusChem , 79 (7) pp. 1024-1029. 10.1002/cplu.201402037. Green open access

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Abstract

Aerosol-assisted chemical vapour deposition (AACVD) reactions of GaMe3, ZnEt2 and the donor-functionalised alcohol HOCH2CH2OMe (6 equiv.) in toluene resulted in the deposition of amorphous transparent zinc gallate (ZnGa2O4) films at a range of temperatures (350–550 °C). The zinc–gallium oxide films were analyzed by scanning electron microscopy, X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray analysis, glancing-angle X-ray powder diffraction (XRD) and optical studies. The optimum growth temperature was found to be 450 °C, which produced transparent films with excellent coverage of the substrate. XPS confirmed the presence of zinc, gallium and oxygen in the films. Annealing these films at 1000 °C resulted in crystalline films and glancing-angle powder XRD showed that a zinc gallate spinel framework with a lattice parameter of a=8.336(5) Å was adopted.

Type: Article
Title: Aerosol-Assisted Chemical Vapour Deposition of Transparent Zinc Gallate Films
Open access status: An open access version is available from UCL Discovery
DOI: 10.1002/cplu.201402037
Publisher version: http://dx.doi.org/10.1002/cplu.201402037
Language: English
Additional information: This is the peer reviewed version of the following article: Knapp, CE; Manzi, JA; Kafizas, A; Parkin, IP; Carmalt, CJ; (2014) Aerosol-Assisted Chemical Vapour Deposition of Transparent Zinc Gallate Films. ChemPlusChem, 79 (7) pp. 1024-1029, which has been published in final form at http://dx.doi.org/10.1002/cplu.201402037. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving (This is the peer reviewed version of the following article: [FULL CITE], which has been published in final form at [Link to final article using the DOI]. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving (http://olabout.wiley.com/WileyCDA/Section/id-820227.html#terms).
Keywords: chemical vapor deposition, gallium, spinel phases, thin films, zinc
UCL classification: UCL
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > Dept of Chemistry
URI: https://discovery.ucl.ac.uk/id/eprint/1443618
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