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Single-source CVD routes to titanium phosphide

Blackman, CS; Carmalt, CJ; Parkin, IP; Apostolico, L; Molloy, KC; White, AJP; Williams, DJ; (2002) Single-source CVD routes to titanium phosphide. J CHEM SOC DALTON (13) 2702 - 2709. 10.1039/b203613b.

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Abstract

Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.

Type:Article
Title:Single-source CVD routes to titanium phosphide
DOI:10.1039/b203613b
Keywords:TRANSITION-METAL PHOSPHIDES, STRUCTURAL CHARACTERIZATION, COMPLEXES, FILMS, TEMPERATURE, DEPOSITION, COMPOUND, TICL4
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > Chemistry

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