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Synthesis of Zirconium Guanidinate Complexes and the Formation of Zirconium Carbonitride via Low Pressure CVD

Potts, SE; Carmalt, CJ; Blackman, CS; Abou-Chahine, F; Pugh, D; Davies, HO; (2009) Synthesis of Zirconium Guanidinate Complexes and the Formation of Zirconium Carbonitride via Low Pressure CVD. ORGANOMETALLICS , 28 (6) 1838 - 1844. 10.1021/om801053y.

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Abstract

Thin films of zirconium carbonitride have been deposited on glass at 600 degrees C from two novel guanidinate precursors: [ZrCp'{eta(2)-((PrN)-Pr-i)(2)CNMe2}(2)Cl] and [ZrCp'(2){eta(2)-((PrN)-Pr-i)(2)CNMe2}Cl] (2) (Cp' = monomethylcyclopentadienyl). Both compounds 1 and 2 were structurally characterized by X-ray crystallography. The films grown via low pressure chemical vapor deposition (LPCVD) from compound 1 were mirror-like with a red-brown sheen whereas those from 2 were gray. Chlorine was present in the films although the levels were no higher than 3 at.%. These two compounds clearly show how the coordination environment around the metal center affects the composition of the film, as films from 1 were nitrogen rich and those from 2 were carbon rich. The films were uniform, adhesive, abrasion resistant, conformal, and hard, being resistant to scratching with steel and brass scalpels.

Type:Article
Title:Synthesis of Zirconium Guanidinate Complexes and the Formation of Zirconium Carbonitride via Low Pressure CVD
DOI:10.1021/om801053y
Keywords:NITRIDE THIN-FILMS, CHEMICAL-VAPOR-DEPOSITION, ATOMIC LAYER DEPOSITION, TITANIUM IMIDO COMPLEXES, DUAL SOURCE APCVD, CRYSTAL-STRUCTURE, STRUCTURAL-CHARACTERIZATION, PRECURSORS, METAL, REACTIVITY
UCL classification:UCL > School of BEAMS > Faculty of Maths and Physical Sciences > Chemistry

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