UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

A New Approach for CMOS-Compatible Fabrication of Cantilever/Tip Systems for Probe-Storage Applications

Lazzerini, GM; Surdo, S; Barillaro, G; (2009) A New Approach for CMOS-Compatible Fabrication of Cantilever/Tip Systems for Probe-Storage Applications. In: Zito, D, (ed.) PRIME: PROCEEDINGS OF THE CONFERENCE 2009 PHD RESEARCH IN MICROELECTRONICS AND ELECTRONICS. (pp. 100 - 103). IEEE

Full text not available from this repository.

Abstract

In this work an original approach for the fabrication of the mechanical part of the Millipede, a MEMS-based scanning-probe data storage system, is reported. It allows the integration of both mechanical and electronic parts on the same wafer, by using CMOS-compatible processes. The proposed approach is based on the selective etching of p-type silicon, used as a sacrificial layer, with respect to n-type silicon, which is exploited as structural material (selective p-to-n electropolishing). Experimental results on chips fabricated by using the BCD6 process of STMicroelectronics demonstrate the feasibility of using this approach for the fabrication of freestanding n-type silicon cantilevers by selective etching of the p-type substrates.

Type: Proceedings paper
Title: A New Approach for CMOS-Compatible Fabrication of Cantilever/Tip Systems for Probe-Storage Applications
Event: 5th International Conference on Ph D Research in MicroElectronics and Electronics
Location: Univ Coll Cork, Cork, IRELAND
Dates: 2009-07-12 - 2009-07-17
ISBN-13: 978-1-4244-3732-0
Keywords: CHIP
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/140434
Downloads since deposit
0Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item