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Focused-Ion-Beam Direct-Writing of Ultra-Thin Superconducting Tungsten Composite Films

Li, WX; Fenton, JC; Warburton, PA; (2009) Focused-Ion-Beam Direct-Writing of Ultra-Thin Superconducting Tungsten Composite Films. IEEE Transactions on Applied Superconductivity , 19 (3) 2819 - 2822. 10.1109/TASC.2009.2019251. Green open access

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Abstract

Tungsten composite films of thickness as low as 19 nm have been deposited using a 30 keV Ga+ focused-ion-beam with tungsten carboxyl (W(CO)(6)) as the gas precursor. Films of thickness 25 nm or more are superconducting with a transition temperature exceeding 5 K. Films in the thickness range 25 nm to 50 nm show an increasing T-c for a decreasing film thickness. This correlates well with the measured dependence of the normal state resistivity upon film thickness. We attribute this behavior to an increase in the BCS electron-phonon interaction potential resulting from a reduction in the electron mean-free-path as the film thickness is reduced. In the light of these data we discuss the applicability of FIB-deposited tungsten for devices requiring ultra-thin superconducting films, including photon detectors and phase-slip qubits.

Type: Article
Title: Focused-Ion-Beam Direct-Writing of Ultra-Thin Superconducting Tungsten Composite Films
Open access status: An open access version is available from UCL Discovery
DOI: 10.1109/TASC.2009.2019251
Publisher version: http://dx.doi.org/10.1109/TASC.2009.2019251
Language: English
Additional information: © 2009 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Keywords: Direct-writing, focused-ion-beam, superconductivity, thin film, tungsten composite, INDUCED DEPOSITION, NANOWIRES
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1403060
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