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Reactive chemistry of C2Hx species on CVD diamond

Loh, KP; Foord, JS; Jackman, RB; (1998) Reactive chemistry of C2Hx species on CVD diamond. DIAMOND AND RELATED MATERIALS , 7 (2-5) 243 - 246.

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Abstract

The reactive chemistry of ethyl species on the diamond surface in the presence atomic H/D has been studied. At low H surface concentrations, a thermally driven pathway converts mono-bonded ethyl into di-bonded ethylene on the surface, leading to decomposition to adsorbed carbon. In the presence of surface H, this pathway is largely blocked leading to spontaneous desorption as ethene after beta-elimination at 750 K. The adsorbed ethyl radical is kinetically unstable when irradiated with atomic D and undergoes spontaneous desorption as ethene and ethane. We conclude from the results that adsorbed ethyl species are too unstable to be able to contribute effectively to diamond growth, but they could play a role in diamond etching. (C) 1998 Published by Elsevier Science S.A.

Type: Article
Title: Reactive chemistry of C2Hx species on CVD diamond
Location: EDINBURGH, SCOTLAND
Keywords: CVD diamond, relative chemistry, diamond surface, electron spectroscopy, ACETYLENE, GROWTH
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/139012
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