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CHEMICAL ROUTES TO GAAS ETCHING WITH LOW-ENERGY ION-BEAMS

TYRRELL, GC; MARSHALL, D; BECKMAN, J; JACKMAN, RB; (1991) CHEMICAL ROUTES TO GAAS ETCHING WITH LOW-ENERGY ION-BEAMS. JOURNAL OF PHYSICS-CONDENSED MATTER , 3 S179-S186. 10.1088/0953-8984/3/S/029.

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Type: Article
Title: CHEMICAL ROUTES TO GAAS ETCHING WITH LOW-ENERGY ION-BEAMS
Location: SOUTHAMPTON, ENGLAND
DOI: 10.1088/0953-8984/3/S/029
Keywords: Science & Technology, Physical Sciences, Physics, Condensed Matter, Physics, PHYSICS, CONDENSED MATTER, GAAS(100), CHLORINE, CL-2
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Engineering Science
URI: http://discovery.ucl.ac.uk/id/eprint/138945
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