Tyrrell, GC and Marshall, D and Beckham, J and Jackman, RB (1991) Chemical routes to GaAs etching with low energy ion beams. Journal of Physics: Condensed Matter , 36 179 - ?.
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| Type: | Article |
|---|---|
| Title: | Chemical routes to GaAs etching with low energy ion beams |
| UCL classification: | UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering |
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