Tyrrell, GC; Marshall, D; Beckham, J; Jackman, RB; (1991) Chemical routes to GaAs etching with low energy ion beams. Journal of Physics: Condensed Matter , 36 179 - ?.
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|Title:||Chemical routes to GaAs etching with low energy ion beams|
|UCL classification:||UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering|
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