Beckman, J and Jackman, RB and Foord, JS (1994) Capacitively coupled r.f. plasma sources: a viable approach for CVD diamond growth? Diamond and Related Materials , 3 (4-6) 602 - 607.
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|Title:||Capacitively coupled r.f. plasma sources: a viable approach for CVD diamond growth?|
|UCL classification:||UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering|
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