Beckman, J and Jackman, RB and Foord, JS (1994) Capacitively coupled r.f. plasma sources: a viable approach for CVD diamond growth? Diamond and Related Materials , 3 (4-6) 602 - 607.
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| Type: | Article |
|---|---|
| Title: | Capacitively coupled r.f. plasma sources: a viable approach for CVD diamond growth? |
| UCL classification: | UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering |
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