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DRY ETCHING TECHNIQUES FOR GAAS ULTRA-HIGH VACUUM CHAMBER INTEGRATED PROCESSING

MARSHALL, D; JACKMAN, RB; (1994) DRY ETCHING TECHNIQUES FOR GAAS ULTRA-HIGH VACUUM CHAMBER INTEGRATED PROCESSING. INTEGRATED PROCESSING FOR MICROELECTRONICS AND OPTOELECTRONICS , 42 pp. 287-292.

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Type: Article
Title: DRY ETCHING TECHNIQUES FOR GAAS ULTRA-HIGH VACUUM CHAMBER INTEGRATED PROCESSING
Location: STRASBOURG, FRANCE
Keywords: Science & Technology, Technology, Physical Sciences, Engineering, Manufacturing, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Optics, Engineering, Materials Science
UCL classification: UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Engineering Science
URI: http://discovery.ucl.ac.uk/id/eprint/138898
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