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Surface spectroscopic studies of the initial stages of diamond growth on Si(100)

Jackman, RB; Chua, LH; Foord, JS; (1993) Surface spectroscopic studies of the initial stages of diamond growth on Si(100). In: (pp. pp. 677-682).

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Abstract

The interaction of hot filament `activated' methane and hydrogen with Si(100) surfaces has been probed in situ for the first time, using Auger electron and thermal desorption spectroscopies. It is shown that hot filament activation of methane results in the chemisorption of acetylene and ethylene on Si(100). Atomic hydrogen drives a range of surface reactions within the adsorbed phases formed. In particular hydrogen abstraction is observed which results in the efficient conversion of ethylene to adsorbed acetylene, and further reactions take place between atomic hydrogen, acetylene and C1 species, resulting in the formation of C3 hydrocarbon species. The implications of this work for diamond film growth are considered, and the results are used to develop a model to describe the growth of sp3 hybridized hydrocarbon chains on the Si surface.

Type: Proceedings paper
Title: Surface spectroscopic studies of the initial stages of diamond growth on Si(100)
ISBN: 1558991778
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/138895
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