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NOVEL PRECURSORS FOR CHEMICALLY ASSISTED ION-BEAM ETCHING - REACTIONS OF DICHLOROETHANE ON GAAS(100)

MARSHALL, D; JACKMAN, RB; (1993) NOVEL PRECURSORS FOR CHEMICALLY ASSISTED ION-BEAM ETCHING - REACTIONS OF DICHLOROETHANE ON GAAS(100). VACUUM , 44 (3-4) pp. 249-256. 10.1016/0042-207X(93)90164-6.

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Type: Article
Title: NOVEL PRECURSORS FOR CHEMICALLY ASSISTED ION-BEAM ETCHING - REACTIONS OF DICHLOROETHANE ON GAAS(100)
DOI: 10.1016/0042-207X(93)90164-6
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Physics, Applied, Materials Science, Physics, MOLECULAR CHLORINE, GAAS, SURFACE, CL-2, SCATTERING, DESORPTION, MECHANISM, INP, CL2
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/138893
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