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DIAMOND-LIKE CARBON WITHIN MICROELECTRONICS - DIELECTRIC-PROPERTIES ON SILICON AND GAAS

JACKMAN, RB; CHUA, LH; (1992) DIAMOND-LIKE CARBON WITHIN MICROELECTRONICS - DIELECTRIC-PROPERTIES ON SILICON AND GAAS. DIAMOND AND RELATED MATERIALS , 1 (8) pp. 895-899. 10.1016/0925-9635(92)90131-7.

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Type: Article
Title: DIAMOND-LIKE CARBON WITHIN MICROELECTRONICS - DIELECTRIC-PROPERTIES ON SILICON AND GAAS
DOI: 10.1016/0925-9635(92)90131-7
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, INSULATOR SEMICONDUCTOR STRUCTURES, PULSE PLASMA METHOD, FILMS
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/138890
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