UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

Elemenetary surface reactions in photochemical processing; Tungsten deposition from WF6 over Si(100)

Jackman, RB; Price, RJ; Foord, JS; (1987) Elemenetary surface reactions in photochemical processing; Tungsten deposition from WF6 over Si(100). In: (Proceedings) Photon, beam and plasma enhanced processing. (pp. 117-).

Full text not available from this repository.
Type: Proceedings paper
Title: Elemenetary surface reactions in photochemical processing; Tungsten deposition from WF6 over Si(100)
Event: Photon, beam and plasma enhanced processing
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
URI: http://discovery.ucl.ac.uk/id/eprint/138873
Downloads since deposit
0Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item