An impedance spectroscopic investigation of the electrical properties of delta-doped diamond structures.
J APPL PHYS
, Article 103707. 10.1063/1.3261759.
Impedance spectroscopy has been used to investigate the conductivity displayed by diamond doped with boron in an intrinsic-delta-layer-intrinsic multilayer system with differing delta-layer thicknesses. Carrier transport within 5 nm delta-layer structures is complex, being dominated by conduction in the interfacial regions between the delta-layer and the intrinsic regions, as well as conduction within the delta-layer itself. In the case of 3.2 nm thick delta-layers the situation appears improved with uncapped samples supporting only two conduction paths, one of which may be associated with transport outside of the delta-layer, the other low transport within the delta-layer complex diamond structures. Introduction of the capping layer creates a third conduction path associated with unwanted boron in the capping layer-delta-layer interface. (C) 2009 American Institute of Physics. [doi:10.1063/1.3261759]
|Title:||An impedance spectroscopic investigation of the electrical properties of delta-doped diamond structures|
|Keywords:||ELECTRONIC APPLICATIONS, DEPOSITED DIAMOND, CVD DIAMOND, THIN-FILMS, HYDROGEN, CHANNEL, DEVICES, FABRICATION, TRANSISTORS, STABILITY|
|UCL classification:||UCL > School of BEAMS
UCL > School of BEAMS > Faculty of Engineering Science
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