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Fabrication and characterisation of triangle-faced single crystal diamond micro-cantilevers

Ahmad, RK; Kupfer, BZ; Zainal, A; Jackman, RB; (2010) Fabrication and characterisation of triangle-faced single crystal diamond micro-cantilevers. Diamond and Related Materials , 19 450 - 457. 10.1016/j.diamond.2010.01.046.

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Abstract

Single crystal diamond offers superior properties for MEMS applications to polycrystalline forms of this material. Here, a process based solely on focussed ion beam milling (Ga), has been used to fabricate nanometre-width diamond cantilevers we lengths of several tens of microns. The procedure results in low damage structures with little Ga incorporation, following post-fabrication annealing. The triangular profile of a cantilever produced using this technique is shown, theoretically, to have a factor of three improved defection response to a load typically encountered during chemical sensing compared to a conventional rectangular lever of similar dimensions.

Type:Article
Title:Fabrication and characterisation of triangle-faced single crystal diamond micro-cantilevers
DOI:10.1016/j.diamond.2010.01.046
UCL classification:UCL > School of BEAMS > Faculty of Engineering Science > Electronic and Electrical Engineering

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