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Gas-phase reactions during reactive laser ablation of Ti and Si in N-2 and O-2 rarefied atmospheres analysed using energy-dispersive mass spectrometry

Coccia, LG; Tyrrell, GC; Boyd, IW; (1997) Gas-phase reactions during reactive laser ablation of Ti and Si in N-2 and O-2 rarefied atmospheres analysed using energy-dispersive mass spectrometry. APPLIED SURFACE SCIENCE , 109 pp. 413-418. 10.1016/S0169-4332(96)00763-5.

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Type: Article
Title: Gas-phase reactions during reactive laser ablation of Ti and Si in N-2 and O-2 rarefied atmospheres analysed using energy-dispersive mass spectrometry
Location: STRASBOURG, FRANCE
DOI: 10.1016/S0169-4332(96)00763-5
Keywords: Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Chemistry, Materials Science, Physics, DEPOSITION, FILMS, TITANIUM, EMISSION, PLASMA, O2, IRRADIATION, OXIDATION, NITRIDE, N2O
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384287
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