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VUV light-induced decomposition of palladium acetate films for electroless copper plating

Zhang, JY; King, SL; Boyd, IW; Fang, Q; (1997) VUV light-induced decomposition of palladium acetate films for electroless copper plating. APPLIED SURFACE SCIENCE , 109 pp. 487-492. 10.1016/S0169-4332(96)00791-X.

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Type: Article
Title: VUV light-induced decomposition of palladium acetate films for electroless copper plating
Location: STRASBOURG, FRANCE
DOI: 10.1016/S0169-4332(96)00791-X
Keywords: Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Chemistry, Materials Science, Physics, EXCIMER UV SOURCES, DEPOSITION, LINES
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384286
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