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Development of large area excimer VUV and UV sources from a dielectric barrier discharge

Zhang, JY; Boyd, IW; (1997) Development of large area excimer VUV and UV sources from a dielectric barrier discharge. FLAT PANEL DISPLAY MATERIALS III , 471 pp. 53-58. 10.1557/PROC-471-53.

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Type: Article
Title: Development of large area excimer VUV and UV sources from a dielectric barrier discharge
Location: SAN FRANCISCO, CA
DOI: 10.1557/PROC-471-53
Keywords: Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Materials Science
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384284
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