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NEW EXCIMER ULTRAVIOLET SOURCES FOR PHOTO-ASSISTED DEPOSITION OF THIN FILMS - AN ALTERNATIVE TO EXCIMER LASER-INDUCED DEPOSITION

BOYD, IW; ZHANG, JY; BERGONZO, P; (1995) NEW EXCIMER ULTRAVIOLET SOURCES FOR PHOTO-ASSISTED DEPOSITION OF THIN FILMS - AN ALTERNATIVE TO EXCIMER LASER-INDUCED DEPOSITION. LASER-INDUCED THIN FILM PROCESSING , 2403 pp. 290-301. 10.1117/12.206260.

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Type: Article
Title: NEW EXCIMER ULTRAVIOLET SOURCES FOR PHOTO-ASSISTED DEPOSITION OF THIN FILMS - AN ALTERNATIVE TO EXCIMER LASER-INDUCED DEPOSITION
Location: SAN JOSE, CA
DOI: 10.1117/12.206260
Keywords: Science & Technology, Technology, Physical Sciences, Materials Science, Coatings & Films, Optics, Materials Science, EXCIMER LAMP, ULTRAVIOLET, ORGANOMETALLIC FILM, DIELECTRIC MATERIALS, THIN FILMS, OXIDATION, PHOTOINDUCED CVD, PHOTOINDUCED MOD
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384280
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