UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS

BERGONZO, P; PATEL, P; BOYD, IW; KOGELSCHATZ, U; (1992) DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS. APPLIED SURFACE SCIENCE , 54 pp. 424-429. 10.1016/0169-4332(92)90081-8.

Full text not available from this repository.
Type: Article
Title: DEVELOPMENT OF A NOVEL LARGE AREA EXCIMER LAMP FOR DIRECT PHOTO DEPOSITION OF THIN-FILMS
Location: STRASBOURG, FRANCE
DOI: 10.1016/0169-4332(92)90081-8
Keywords: Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Chemistry, Materials Science, Physics, DIELECTRIC-BARRIER DISCHARGES, SILICON DIOXIDE FILMS, VAPOR-DEPOSITION, OXIDATION, OXYGEN
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384226
Downloads since deposit
0Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item