UCL logo

UCL Discovery

UCL home » Library Services » Electronic resources » UCL Discovery

LOW-PRESSURE PHOTODEPOSITION OF SILICON-NITRIDE FILMS USING A XENON EXCIMER LAMP

BERGONZO, P; BOYD, IW; (1993) LOW-PRESSURE PHOTODEPOSITION OF SILICON-NITRIDE FILMS USING A XENON EXCIMER LAMP. APPLIED PHYSICS LETTERS , 63 (13) pp. 1757-1759. 10.1063/1.110705.

Full text not available from this repository.
Type: Article
Title: LOW-PRESSURE PHOTODEPOSITION OF SILICON-NITRIDE FILMS USING A XENON EXCIMER LAMP
DOI: 10.1063/1.110705
Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, CHEMICAL VAPOR-DEPOSITION, THIN-FILMS, SIO2
UCL classification: UCL > Provost and Vice Provost Offices
UCL > Provost and Vice Provost Offices > UCL BEAMS
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Engineering Science > Dept of Electronic and Electrical Eng
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences
UCL > Provost and Vice Provost Offices > UCL BEAMS > Faculty of Maths and Physical Sciences > London Centre for Nanotechnology
URI: http://discovery.ucl.ac.uk/id/eprint/1384214
Downloads since deposit
0Downloads
Download activity - last month
Download activity - last 12 months
Downloads by country - last 12 months

Archive Staff Only

View Item View Item